Electrostatic protection circuit and semiconductor integrated circuit

ABSTRACT

An electrostatic protection circuit includes first and second output terminals, a first diode circuit connected between the first output terminal and a first node, a second diode circuit connected between the second output terminal and the first node, a first intermediate voltage circuit that is connected between the first output terminal and the second output terminal and that is configured to generate, at a second node different from the first node, a first intermediate voltage having an intermediate voltage value between a voltage value of the first output terminal and a voltage value of the second output terminal, a detection circuit configured to generate a trigger signal in accordance with the first intermediate voltage, and a switch circuit configured to electrically connect the first node to a ground line in accordance with the trigger signal.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority based on Japanese Patent Application No. 2020-192377, filed on Nov. 19, 2020, and the entire contents of the Japanese patent application are incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates to an electrostatic protection circuit and a semiconductor integrated circuit.

BACKGROUND

As a circuit built in an optical transmitter module or the like, an output circuit that generates an output signal in accordance with an input voltage signal is used. For example, the output circuit outputs a drive signal for driving an optical modulator. In such an output circuit, protection against electrostatic discharge (ESD) may be necessary. Patent Literature 1 (Japanese Patent Application Laid-Open No. 2015-173214) discloses an output circuit which is of an open-drain type and includes an output signal terminal, a floating line, a diode that causes a current to flow from the output signal terminal to the floating line, and an ESD protection circuit that connects the floating line to a ground potential when an ESD current flows into the floating line.

SUMMARY

An electrostatic protection circuit according to an aspect of the present disclosure includes a first output terminal, a second output terminal, a first diode circuit connected between the first output terminal and a first node, a second diode circuit connected between the second output terminal and the first node, a first intermediate voltage circuit that is connected between the first output terminal and the second output terminal and that is configured to generate, at a second node different from the first node, a first intermediate voltage having an intermediate voltage value between a voltage value of the first output terminal and a voltage value of the second output terminal, a detection circuit configured to generate a trigger signal in accordance with the first intermediate voltage, and a switch circuit configured to electrically connect the first node to a ground line in accordance with the trigger signal.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram illustrating a schematic configuration of a drive circuit 200 according to an embodiment of a semiconductor integrated circuit of the present disclosure.

FIG. 2 is a circuit diagram illustrating a configuration of an electrostatic protection circuit according to an embodiment.

FIG. 3 is a circuit diagram illustrating the output circuit 100 in FIG. 1 connected to an external load.

FIG. 4 is a block diagram illustrating a configuration of an optical transmitter module 400 according to an embodiment.

FIG. 5 is a block diagram illustrating a configuration of an optical transceiver module 500 according to an embodiment.

FIG. 6 is a circuit diagram illustrating a configuration of an output circuit 100 according to a modification.

FIG. 7 is a circuit diagram illustrating a configuration of an output circuit 100 according to a modification.

DETAILED DESCRIPTION

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the description of the drawings, same or corresponding elements are denoted by same reference numerals and redundant descriptions thereof will be omitted.

FIG. 1 is a block diagram illustrating a configuration of a drive circuit 200 according to an embodiment of a semiconductor integrated circuit of the present disclosure. Drive circuit 200 is built in a device for optical communication such as an optical transmitter module. Drive circuit 200 is a semiconductor integrated circuit (IC) manufactured by a semiconductor process such as a SiGe bipolar complementary metal oxide semiconductor (BiCMOS), which has a size of 2 mm×4 mm. Drive circuit 200 amplifies an input voltage signal and outputs the amplified voltage signal. Drive circuit 200 includes a pair of input terminals 130 a and 130 b, a pair of output terminals 131 a and 131 b, an input circuit 110, and an output circuit 100. In the following description, the IC may also be referred to as a semiconductor chip.

Input terminals 130 a and 130 b receives a differential signal which includes, for example, two signals having same amplitudes and reversed phases to each other. Input circuit 110 amplifies the input differential signal and outputs the amplified differential signal to output circuit 100. Output circuit 100 further amplifies the differential signal output from input circuit 110 and outputs the amplified differential signal to an outside of drive circuit 200. For example, output circuit 100 is cascade-connected to the input circuit 110.

Note that the circuit configuration of drive circuit 200 may be changed as appropriate, input circuit 110 may be omitted, or various other circuits may be added. In addition, the number of signal transmission paths (channels) is not limited to one, and a plurality of channels (for example, four channels) may be arranged in parallel.

Next, the configuration of output circuit 100 which is the semiconductor integrated circuit of the present embodiment will be described with reference to FIGS. 2 and 3 . In the following description, a voltage will be described with reference to a ground potential (0V) unless otherwise specified. For example, when a potential of a certain node in the circuit is Vnode, the potential difference between the potential of the node and the ground potential is a voltage Vnode. Therefore, the potential of the node and the voltage of the node represent the same thing Although an operation of a circuit is described using a voltage as a term, the voltage also means a potential. When the ground potential is not used as a reference, a reference potential (source potential) is indicated by describing as in the case of a gate-source voltage, for example.

FIG. 2 is a circuit diagram illustrating a configuration of an electrostatic protection circuit according to an embodiment. FIG. 2 illustrates a configuration of output circuit 100 including an electrostatic protection circuit 65, an internal circuit 67 to which electrostatic protection circuit 65 is connected, and the like. Output circuit 100 is a differential amplifier circuit that outputs a differential current signal that is a current signal in accordance with a differential signal that is an input voltage signal. Output circuit 100 is an integrated circuit formed on a Si substrate by a semiconductor process such as SiGe BiCMOS. A maximum power supply voltage of the integrated circuit on which output circuit 100 is mounted is, for example, 3.3 V. The input differential signal is, for example, a constant amplitude binary signal (for example, an NRZ (Non Return to Zero) signal) or an amplitude-modulated signal having multiple values (for example, a PAM (Pulse Amplitude Modulation) 4 signal having four levels in amplitude). Modulation speeds of these signals are, for example, 100 GBaud.

Output circuit 100 includes bipolar transistors 10 a, 10 b, 11 a, 11 b, and 12, resistors 20 a, 20 b, 21 a, 21 b, and 22, diodes (diode circuits) 30 a, 30 b, 35 a, and 35 b, a capacitor 40, metal oxide semiconductor (MOS) transistors 50, 55, and 56, input signal terminals 91 a and 91 b, output signal terminals 92 a and 92 b, ground lines 80 a, 80 b, 80 c, and 80 d, and bias supply terminals 93 and 94. A clamp circuit 60 includes resistor 22, capacitor 40, and MOS transistors 50, 55, and 56 among these components. Electrostatic protection circuit (ESD protection circuit) 65 includes clamp circuit 60, diodes 30 a, 30 b, 35 a, and 35 b, resistors 21 a and 21 b, and ground lines 80 b, 80 c, and 80 d. An internal circuit 67, which is a differential amplifier circuit electrically connected to a pair of output signal terminals 92 a (first output terminal) and 92 b (second output terminal), includes bipolar transistors 10 a, 10 b, 11 a, 11 b, and 12, resistors 20 a and 20 b, input signal terminals 91 a and 91 b, bias supply terminals 93 and 94, and ground line 80 a.

First, components included in internal circuit 67 will be described.

In bipolar transistor 10, the base is connected to input signal terminal 91 a, the collector is connected to the emitter of bipolar transistor 11 a, and the emitter is connected to one end of resistor 20 a. In bipolar transistor 10 b, the base is connected to input signal terminal 91 b, the collector is connected to the emitter of bipolar transistor 11 b, and the emitter is connected to one end of resistor 20 b. Bipolar transistors 10 a and 10 b may be, for example, an NPN-type heterojunction bipolar transistor (HBT). Bipolar transistors 10 a and 10 b may be replaced with, for example, n-type MOS transistors.

In bipolar transistor 11 a, the base is connected to bias supply terminal 94, the emitter is connected to the collector of bipolar transistor 10 a, and the collector is connected to output signal terminal 92 a. In bipolar transistor 11 b, the base is connected to bias supply terminal 94, the emitter is connected to the collector of bipolar transistor 10 b, and the collector is connected to output signal terminal 92 b. Bipolar transistors 11 a and 11 b are, for example, cascode transistors. For example, a DC voltage is applied to each base of bipolar transistors 11 a and 11 b through bias supply terminal 94. With this configuration, voltage amplitudes at collectors of bipolar transistors 10 a and 10 b are suppressed, and mirror effect of a capacitance between the base and the collector of each of bipolar transistors 10 a and 10 b is suppressed. Therefore, it is possible to widen a bandwidth of output circuit 100. Furthermore, since an output resistance of output circuit 100 increases due to the presence of bipolar transistors 11 a and 11 b, a voltage gain of output circuit 100 can be improved. Bipolar transistors 11 a and 11 b may be replaced with, for example, n-type MOS transistors. When the bandwidth of output circuit 100 is sufficiently wide, bipolar transistors 11 a and 11 b may be omitted.

One end of each of resistors 20 a and 20 b is connected to each emitter of bipolar transistors 10 a and 10 b, and the other end of each of resistors 20 a and 20 b is connected to a collector of bipolar transistor 12. Resistors 20 a and 20 b are degeneration resistors and allow output circuit 100 to expand its linear input range. Resistors 20 a and 20 b are, for example, n-type poly-Si resistors. When the linear input range of output circuit 100 is sufficiently wider than a use range, resistors 20 a and 20 b may be omitted.

In bipolar transistor 12, the collector is connected to the other end of each of resistors 20 a and 20 b, a base is connected to bias supply terminal 93, and an emitter is connected to ground line 80 a, so that bipolar transistor 12 functions as a current source. Bipolar transistor 12 generates a current corresponding to a voltage of bias supply terminal 93, and a current value is, for example, 60 mA. Internal circuit 67 may be configured such that a base voltage of another diode-connected bipolar transistor is applied to bias supply terminal 93. In this case, a current mirror is formed, and the amount of a current generated by bipolar transistor 12 is easily adjusted. Therefore, bipolar transistor 12 may be a variable current source. Instead of bipolar transistor 12, a MOS transistor may also be used. Also, instead of bipolar transistor 12, a resistor or a circuit including a resistor and an inductor may be used.

Output circuit 100 including internal circuit 67 having the above-described configuration includes a pair of bipolar transistors 10 a and 10 b that are connected in parallel to each other between the ground potential and a pair of output signal terminals 92 a and 92 b. The base of bipolar transistor 10 a is connected to input signal terminal 91 a and the base of the bipolar transistor 10 b is connected to input terminal 92 b. The pair of bipolar transistors 10 a and 10 b functions as a differential amplifier circuit that amplifies a differential signal input from the pair of input signal terminals 91 a and 91 b, and outputs the amplified differential signal to the pair of output signal terminals 92 a and 92 b. Here, output circuit 100 may be referred to as open collector circuit because the collectors of bipolar transistors 11 a and 11 b are connected to output signal terminals 92 a and 92 b, respectively, without being terminated, that is, without being electrically connected to an internal power supply line or an internal ground line through an internal resistor (for example, a resistor in the integrated circuit on which output circuit 100 is mounted). When bipolar transistors 10 a, 10 b, 11 a, and 11 b are replaced with MOS transistors, output circuit 100 is referred to as an open drain circuit.

FIG. 3 illustrates a configuration of output circuit 100 that is connected to an external load. FIG. 3 illustrates an IC101 which is mounted on a communication apparatus, for example. As illustrated in FIG. 3 , in output circuit 100 mounted on IC101, output signal terminals 92 a and 92 b are connected to an external load 102 to which a predetermined voltage (for example, 5.0 V) is applied by an external power supply 106. That is, each of output signal terminals 92 a and 92 b is connected to respective connection terminals 103 a and 103 b of external load 102 through each of electrical wirings 105 a and 105 b. External load 102 includes load resistors 104 a and 104 b that are each disposed between connection terminals 103 a and 103 c and between connection terminals 103 b and 103 c, respectively, and that have predetermined resistance values (for example, 30Ω). Connection terminal 103 c is connected to external power supply 106 through an electrical wiring 105 c. As a result, output signal terminal 92 a is terminated at external power supply 106 through load resistor 104 a, and output signal terminal 92 b is terminated at external power supply 106 through load resistor 104 b. With such a connection configuration, a voltage value of a differential signal at output signal terminals 92 a and 92 b is determined mainly by a voltage of external power supply 106, resistance values of load resistors 104 a and 104 b, and an output current of output circuit 100.

In other words, the differential current signal output from the pair of output signal terminals 92 a and 92 b is converted to a differential voltage signal by load resistors 104 a and 104 b. More specifically, for example, a positive phase signal of the differential voltage signal is generated by load resistor 104 a, and a negative phase signal of the differential voltage signal is generated by load resistor 104 b. The positive phase signal and the negative phase signal are a pair of complementary signals and constitute the differential voltage signal. For example, when the positive phase signal increases, the negative phase signal decreases, and when the positive phase signal decreases, the negative phase signal increases. The negative phase signal has a phase opposite to the phase of the positive phase signal. For example, when the positive-phase signal reaches a maximum value (peak voltage), the negative-phase signal reaches a minimum value (bottom voltage), and when the positive-phase signal reaches a minimum value (bottom voltage), the negative-phase signal reaches a maximum value (peak voltage). Preferably, the negative phase signal has the same amplitude as the amplitude of the positive phase signal. It is preferable that the negative phase signal has the same mean voltage value (DC component) as the mean voltage value (DC component) of the positive phase signal.

Next, components of ESD protection circuit 65 will be described.

Resistors 21 a (first dividing resistor) and 21 b (second dividing resistor) constitute an intermediate voltage circuit 21 (first intermediate voltage circuit) that generates an intermediate voltage (first intermediate voltage) having an intermediate voltage value between voltage values of a pair of output signal terminals, that is, between a voltage value of output signal terminal 92 a and a voltage value of output signal terminal 92 b. That is, resistor 21 a is a resistor connected between output signal terminal 92 a and a second node X2. Resistor 21 b is a resistor connected between output signal terminal 92 b and second node X2. Resistor 21 b has a resistance value substantially equal to the resistance value of resistor 21 a. Resistors 21 a and 21 b constitute intermediate voltage circuit 21 which outputs an intermediate voltage at second node X2. Intermediate voltage circuit 21 generates, at second node X2, an intermediate voltage which has an intermediate voltage value between voltages of a pair of output signal terminals 92 a, 92 b, that is, between a voltage value of output signal terminal 92 a and a voltage value of output signal terminal 92 b. The intermediate voltage is also referred to as an “output common-mode voltage” when no ESD occurs (when no differential signal is input to the pair of input signal terminals 91 a and 91 b and internal circuit 67 does not perform an operation of amplification (no signal state) or when internal circuit 67 performs an operation of amplifying a differential signal).

Resistance values of resistors 21 a and 21 b are preferably at least 10 times or more, more preferably 100 times or more as large as the resistance values of load resistors 104 a and 104 b of external load 102. In the former case, a combined load resistance is about 90% of the resistance values of load resistors 104 a and 104 b, and in the latter case, a combined load resistance is about 99% of the resistance values of load resistors 104 a and 104 b, and the influence of intermediate voltage circuit 21 on a signal voltage output during an operation of modulation is suppressed. In the present embodiment, for example, each resistance value of resistors 21 a and 21 b is set to 5 kΩ. An output common-mode voltage generated by resistors 21 a and 21 b is, for example, 4.0 V. Note that “resistance values are substantially equal” means that the resistive values may be different from each other within a practically acceptable range. An acceptable range is, for example, a relative error of 5% or less. Intermediate voltage circuit 21 is, for example, a resistance dividing circuit having a voltage dividing ratio of ½.

A pair of diodes 30 a and 30 b are diodes for ESD protection. Diode 30 a (first diode) is included in a diode circuit (first diode circuit), and has an anode connected to output signal terminal 92 a and a cathode connected to a common node (first node) X1. Diode 30 b (second diode) is included in a diode circuit (second diode circuit), and has an anode connected to output signal terminal 92 b and a cathode connected to common node (first node) X1. Diodes 30 a and 30 b are, for example, PN-junction diodes formed in a P-type well in a semiconductor chip (semiconductor integrated circuit). Diodes 30 a and 30 b serve as discharge paths when a positive ESD voltage is input to output signal terminals 92 a and 92 b.

A pair of diodes 35 a and 35 b are diodes for ESD protection. Diode 35 a has a cathode connected to output signal terminal 92 a and an anode connected to ground line 80 c. Diode 35 b has a cathode connected to output signal terminal 92 b and an anode connected to ground line 80 d. Diodes 35 a and 35 b are, for example, PN-junction diodes formed in an N-type well in a semiconductor chip (semiconductor integrated circuit). Diode 35 a and 35 b serves as discharge paths when a negative ESD voltage is input to output signal terminals 92 a and 92 b.

Clamp circuit 60 is configured to detect a change in an intermediate voltage at second node X2 to generate a trigger signal and to connect, in response to the trigger signal, first node X1 with a ground potential by setting a resistance between first node X1 and ground line 80 b to a low resistance value (first resistance), when a positive ESD voltage is generated at second node X2. Clamp circuit 60 is a circuit for preventing dielectric breakdown of internal circuit 67 in output circuit 100 by suppressing inflow of a discharge current due to the ESD at output signal terminals 92 a and 92 b into internal circuit 67. Clamp circuit 60 has a configuration to withstand an ESD voltage input to output signal terminals 92 a and 92 b by selecting internal elements and designing the circuit.

Clamp circuit 60 includes a detection circuit 70 and a switch circuit 71. Detection circuit 70 detects that an ESD voltage is input to output signal terminals 92 a and 92 b based on the intermediate voltage. Detection circuit 70 includes, for example, a resistor 22, a capacitor 40, and MOS transistors 50 and 55.

Resistor 22 and capacitor 40 form a low pass filter (also referred to as an integrator circuit). That is, resistor (detection resistor) 22 and capacitor 40 are connected in series between second node X2 and ground line 80 b. With such a configuration, for example, when a voltage pulse that changes stepwise is generated at second node X2, a voltage corresponding to the voltage of second node X2 is generated at node Y (detection node) between resistor 22 and capacitor 40 after a delay time of about a time constant determined by the product of a resistance value of resistor 22 and a capacitance of capacitor 40.

MOS transistors 50 and 55 constitute an inverter circuit. MOS transistor 50 is a P-type MOS transistor, and has a source connected to second node X2, a drain connected to a node Z, and a gate connected to node Y. MOS transistor 55 is an N-type MOS transistor, and has a source connected to ground line 80 b, a drain connected to the drain of MOS transistor 50 through node Z, and a gate connected to node Y.

In this inverter circuit, when a voltage of node Y, which increases in accordance with a voltage of second node X2 in response to an increase in voltage at second node X2, is lower than a threshold voltage of the inverter circuit, MOS transistor 50 is turned on, and the output at node Z of the inverter circuit becomes substantially equal to the voltage of second node X2. That is, when the voltage of node Y is at a low level lower than the threshold voltage of the inverter circuit, the voltage of node Z is at a high level due to an inverting amplification by the inverter circuit. Since a power supply voltage of the inverter circuit is the voltage of the second node X2, a voltage value of the high-level is substantially equal to the voltage value of second node X2. On the other hand, after that, when the voltage of node Y becomes higher than the threshold voltage, MOS transistor 55 is turned on, and the output (at node Z) of the inverter circuit becomes substantially equal to the voltage (ground voltage) of ground line 80 b. That is, when the voltage of node Y is low (at a low level), the voltage of node Z becomes high (a high level), when the voltage of node Y is high (at a high level), the voltage of node Z becomes low (a low level), and the voltage of node Z has an inverted relationship with the voltage of node Y.

As described above, the inverter circuit generates a trigger signal at node Z in accordance with the voltage of node Y. Note that the inverter circuit operates using the voltage of second node X2 as a power supply voltage. Therefore, the voltage output as a high level by the inverter circuit changes in accordance with the voltage of second node X2. Here, in the present embodiment, the inverter circuit has a one stage configuration, but may be modified to a configuration in which an odd number of three or more inverter circuits are cascade-connected. Note that in the case where the number of inverter circuits is increased, the time until the voltage of node Z changes in accordance with the voltage of node Y becomes longer due to delay times of the inverter circuits.

Detection circuit 70 outputs a trigger signal to node Z in response to a detection of a change in the intermediate voltage, that is, in accordance with the intermediate voltage and the voltage at node Y. Further, detection circuit 70 generates a trigger signal during a delay time of about a time constant determined by the product of the resistance value of resistor 22 and the capacitance of capacitor 40, that is, during a predetermined period of time. Further, detection circuit 70 generates a trigger signal when the voltage of node Y exceeds the threshold value of the inverter circuit, that is, a predetermined value, in accordance with the voltage of second node X2. For example, as will be described later, MOS transistor 56 is turned off by the trigger signal.

MOS transistor 56 is a switching element including an N-type MOS transistor, and has a drain connected to first node X1, a source connected to ground terminal 80 b, and a gate connected to node Z which is an output node of the inverter circuit. MOS transistor 56 is included in a switch circuit 71 which turns on/off in response to an output of detection circuit 70, and operates so as to be turned on and lower a drain-source resistance (this state is referred to as an on-state) when the voltage of node Z is higher than a threshold voltage of MOS transistor 56. On the other hand, MOS transistor 56 is turned off when the voltage of node Z is lower than the threshold voltage of MOS transistor 56, and operates so as to increase the drain-source resistance. With such a configuration, when the voltage of second node X2 increases, MOS transistor 56 performs, at a timing of generation of the trigger signal, a switching to a state (conduction state) in which an electrical resistance between first node X1 and ground line 80 b is set to a low resistance value (first resistance). Thereby, the voltage of first node X1 is clamped to a relatively low voltage value.

On the other hand, when the voltage of second node X2 is not increased by the input of a ESD voltage, MOS transistor 56 performs a switching to a state (non-conduction state) in which the electrical resistance between first node X1 and ground line 80 b is set to a high resistance value (second resistance). The electrical resistance between first node X1 and ground line 80 b has a value depending on the electrical characteristics of MOS transistor 56. For example, the low resistance value (the first resistance) in a conduction state is equal to an on-resistance between the drain and the source of MOS transistor 56, and the high resistance value (the second resistance) in a non-conduction state is equal to an electrical resistance between the drain and the source of MOS transistor 56 in an off-state. Therefore, the second resistance is greater than the first resistance.

A timing at which MOS transistor 56 is turned on and a voltage at second node X2 required for MOS transistor 56 to be turned on can be appropriately adjusted in accordance with designs of detection circuit 70 and switch circuit 71. In addition, for example, the designs of detection circuit 70 and switch circuit 71 are adjusted so that MOS transistor 56 is never turned on when an output common-mode voltage that is generated at second node X2 during an amplification operation of internal circuit 67 is lower than a predetermined voltage (for example, 5.0 V) of external power supply 106. That is, the designs of detection circuit, inverter circuit, and switch circuit are adjusted so that first node X1 and ground line 80 b are in a conduction state when an ESD voltage significantly exceeding the predetermined voltage (for example, 5.0 V) of external power supply 106 is input to output signal terminals 92 a and 92 b.

An ESD protection operation in output circuit 100 having the above-described configuration will be described. Note that an ESD may occur at either one or both of output signal terminals 92 a and 92 b. For example, in FIG. 3 , upon connecting electrical wiring 105 a to output signal terminal 92 a, there is a possibility that the ESD occurs at output signal terminal 92 a. Similarly, upon connecting electrical wiring 105 b to output signal terminal 92 b, there is a possibility that the ESD occurs at output signal terminal 92 b. Further, upon connecting electrical wiring 105 c to connection terminal 103 c in a state where electrical wiring 105 a and 105 b are connected to IC101, there is a possibility that the ESD occurs at both of output signal terminals 92 a and 92 b. Since the ESD protection operation is the same in any cases, the following description will be given without distinction.

First, when a negative ESD voltage is input to output signal terminals 92 a and 92 b, a current flows from ground lines 80 c and 80 d to output signal terminals 92 a and 92 b through diodes 35 a and 35 b. Accordingly, it is possible to suppress an increase in the negative ESD voltage at output signal terminals 92 a and 92 b and suppress a discharge current due to the ESD from flowing to internal circuit 67, thereby preventing dielectric breakdown of output circuit 100.

Next, when a positive ESD voltage is input to output signal terminals 92 a and 92 b, a discharge current flows from output signal terminals 92 a and 92 b to second node X2 through resistors 21 a and 21 b, so that a voltage of second node X2 increases. Due to the detection circuit 70 of clamp circuit 60, an increase in voltage of node Y is delayed as compared with second node X2. Accordingly, MOS transistor 50 of the inverter circuit of clamp circuit 60 is turned on because the voltage of node Y is lower than a threshold voltage of the inverter circuit and the inverter circuit is supplied with a power supply voltage (a voltage of second node X2), and a voltage of node Z increases. As a result, MOS transistor 56 is turned on, and the increase in voltages of first node X1 and second node X2 is suppressed and the flow of the discharge current due to the ESD into internal circuit 67 is suppressed. In this way, it is possible to prevent dielectric breakdown of output circuit 100.

When the input of the ESD voltage stops (voltage value decreases) in a state where MOS transistor 56 is turned on, the voltage of second node X2 decreases, and the voltage of node Z also decreases accordingly. When the voltage of node Z decreases to the threshold voltage of MOS transistor 56, MOS transistor 56 is turned off, so that the decrease in voltage of first node X1 stops. Thereafter, when output circuit 101 performs an operation of amplification, the voltage of second node X2 is biased with an output common-mode voltage. In addition, when the voltage of second node X2 increases due to the input of the ESD voltage, the voltage of node Y increases with a delay as described above, and when the voltage of node Y exceeds the threshold voltage of the inverter circuit, the voltage of node Z (trigger signal) decreases toward the ground potential. When the voltage of node Z becomes lower than the threshold voltage of MOS transistor 56, MOS transistor 56 is turned off. Therefore, clamp circuit 60 turns off MOS transistor 56 to stop a clamp operation after an elapse of a predetermined time from the detection of the increase in voltage of second node X2. This prevents, for example, MOS transistor 56 from being erroneously turned on and affecting the output signal while output circuit 101 performs an operation of amplification.

In output circuit 100 of the present embodiment, as described above, a current flows from output signal terminals 92 a and 92 b to second node X2 through resistors 21 a and 21 b. Therefore, the increase in voltage of second node X2 becomes faster, and MOS transistor 56 is turned on at an earlier timing, as compared with an output circuit without resistors 21 a and 21 b as disclosed in, for example, Patent Literature 1 (Japanese Patent Application Laid-Open No. 2015-173214). As a result, the increase in voltages of first node X1 and second node X2 can be further suppressed, and output circuit 100 can be more reliably protected.

In output circuit 100 of the present embodiment, second node X2 is separated from the gate of switch circuit 71 by the inverter circuit. As a result, the load capacitance of second node X2 decreases. This is because a switch circuit generally has a large size of a transistor for switching to allow a large ESD current to discharge to a ground line, resulting in a large gate-source capacitance. As a result, an increase in voltage of second node X2 becomes faster, and MOS transistor 56 turns on at an earlier timing. As a result, it is possible to further suppress the increase in voltages of first node X1 and second node X2 and to more reliably protect output circuit 100.

In a state in which output circuit 100 is mounted on a communication device (the state illustrated in FIG. 3 ), the voltages of second node X2 and node Y are equal to each other, and MOS transistor 56 is turned off. Therefore, clamp circuit 60 does not affect an operation of output circuit 100. Here, even in a state in which output circuit 100 is mounted on the communication device, there is a possibility that the voltage of second node X2 varies due to, for example, an operation of amplification of output circuit 100 or a voltage variation of external power supply 106. Therefore, it is desirable to appropriately design the threshold voltage and the like of clamp circuit 60 so that MOS transistor 56 is not erroneously turned on by such a voltage variation.

FIG. 4 illustrates a configuration of an optical transmitter module 400 according to the present embodiment. Optical transmitter module 400 includes drive circuit 200 described above and an optical modulator 300. Drive circuit 200 amplifies and outputs, for example, four input differential signals. Optical modulator 300 generates an optical signal modulated based on the four differential signals output from drive circuit 200 and outputs one optical signal which is subjected to, for example, polarization multiplexing QAM modulation. Optical modulator 300 may generate four optical signals having mutually different peak wavelengths based on the four differential signals. For example, optical modulator 300 outputs four PAM-modulated optical signals. In this case, optical transmitter module 400 may further include an optical multiplexer and may generate and output one wavelength division multiplexed signal by multiplexing the four optical signals using the optical multiplexer. Optical transmitter module 400 is, for example, an optical module in which drive circuit 200 and optical modulator 300 are integrated and mounted in a ceramic package, and has an outer shape having a size of, for example, 30 mm×15 mm×5 mm. According to optical transmitter module 400 having the above-described configuration, since drive circuit 200 on which output circuit 100 is mounted is used, an optical transmitter module that can generate an optical signal having a good waveform quality is realized.

FIG. 5 illustrates a configuration of an optical transceiver module 500 according to the present embodiment. Optical transceiver module 500 includes a receiver circuit 600 and a photoreciever 700 in addition to drive circuit 200 and optical modulator 300 that are described above. Photoreciever 700 receives an optical signal input from the outside through an optical transmission path, and separates four signals (photocurrents) from the optical signal which is subjected to, for example, polarization multiplexing QAM modulation to output the separated signals. Receiver circuit 600 converts the four photocurrents to voltages, amplifies the voltages, and outputs the amplified voltages. According to optical transceiver module 500 having the above-described configuration, since drive circuit 200 on which output circuit 100 is mounted is used, an optical transceiver module that can generate an optical signal having a good waveform quality is realized.

According to ESD protection circuit 65 of the present embodiment described above, when a positive ESD voltage is input to the pair of output signal terminals 92 a and 92 b, a discharge current can flow from the pair of diodes 30 a and 30 b to ground line 80 b through first node X1 by an operation of clamp circuit 60, and dielectric breakdown of internal circuit 67 can be prevented to achieve ESD protection. Furthermore, since clamp circuit 60 operates with a change in the intermediate voltage generated at the second node X2 as a trigger, internal circuit 67 can be protected more reliably.

Furthermore, intermediate voltage circuit 21 of ESD protection circuit 65 includes resistor 21 a which is connected between output signal terminals 92 a and second node X2, and resistor 21 b which is connected between output signal terminal 92 b and second node X2. With such a simple circuit configuration, a voltage having the intermediate voltage between a pair of output signal terminals 92 a and 92 b can be generated at second node X2, and as a result, the certainty of protection of internal circuit 67 against ESD can be improved.

Detection circuit 70 further includes resistor 22 which is connected between second node X2 and node Y, and capacitor 40 which is connected between node Y and a ground line. Detection circuit 70 generates a trigger signal when the difference between a voltage of node X2 and a voltage of node Y becomes larger than a predetermined value. With this configuration, the voltage change of second node X2 can be detected to generate a trigger signal, and as a result, the reliability of ESD protection can be improved.

Detection circuit 70 also generates a trigger signal during a predetermined period of time in response to the intermediate voltage having increased. According to this configuration, it is possible to detect a voltage change of second node X2 and generate a trigger signal during a predetermined period of time, prevent clamp circuit 60 from affecting an output signal when output circuit 100 performs an operation of amplification, and consequently improve the reliability of ESD protection without deteriorating a waveform quality of the output signal.

Detection circuit 70 also includes an inverter circuit that inverts a voltage of node Y and generates a trigger signal. As a result, the trigger signal can be generated by detecting a voltage change of second node X2, and it is possible to improve the reliability of ESD protection.

Switch circuit 71 further includes a switching element that switches, in accordance with a trigger signal generated by detection circuit 70, between a conduction state in which first node X1 and a ground line are in electrical conduction with each other and a non-conduction state in which first node X1 and the ground line are not in electrical conduction with each other. With this configuration, switching is performed in accordance with the voltage of second node X2 using a change in the voltage of second node X2 as a trigger, and thus reliable ESD protection can be realized in accordance with a change in the intermediate voltage.

ESD protection circuit 65 includes diodes 30 a and 30 b. A cathode of diode 30 a and a cathode of diode 30 b are connected to first node X1. An anode of diode 30 a is connected to output signal terminal 92 a, and an anode of diode 30 b is connected to output signal terminal 92 b. In this case, when a positive ESD voltage is input to the pair of output signal terminals 92 a and 92 b, a discharge current can flow toward first node X1 through the pair of diodes 30 a and 30 b and, thus stable ESD protection can be realized.

In addition, in output circuit 100 including ESD protection circuit 65 and internal circuit 67 of the present embodiment, stable ESD protection is realized by ESD protection circuit 65, and internal circuit 67 can be sufficiently protected.

Internal circuit 67 preferably generates a differential output signal in accordance with a differential input signal and outputs the differential output signal to the pair of output signal terminals 92 a and 92 b. In this case, ESD protection can be achieved when an ESD voltage is input to the pair of output signal terminals 92 a and 92 b.

While the principles of the present invention have been illustrated and described in preferred embodiments, it will be appreciated by those skilled in the art that the invention may be modified in arrangement and detail without departing from such principles. The present disclosure is not limited to the specific configurations disclosed in this embodiment. Accordingly, it is claimed that all modifications and changes come from the scope of the claims and their spirit.

The configuration of clamp circuit 60 in ESD protection circuit 65 may be changed as appropriate. For example, a detection circuit having a configuration of a low pass filter may be changed to a configuration of a high pass filter in which connection positions of a resistor and a capacitor are switched, or a configuration of a capacitance voltage-dividing circuit in which a plurality of capacitors are connected in series. In this case, the output voltage of the detection circuit changes substantially at the same time as second node X2, and returns to zero after a certain period of time. Therefore, in clamp circuit 60, the inverter circuit is omitted, or the inverter circuit is configured by two or more even-numbered stages.

In addition, although output circuit 100 of the present embodiment is configured as an open collector circuit, a resistor may be inserted between output signal terminals 92 a and 92 b and the internal power supply or between output signal terminals 92 a and 92 b and the ground line when the operation of output circuit 100 is not affected. For example, resistors having resistance values (for example, 300Ω) ten times or more as large as resistance values of load resistors 104 a and 104 b of external load 102 can be inserted between output signal terminal 92 a and the internal power supply (for example, 3.3 V) and between output signal terminal 92 b and the internal power supply, respectively. In this case, a combined load resistance is about 90% of the resistance values of load resistors 104 a and 104 b. Such a circuit can also be regarded substantially as an open collector circuit.

As in the configuration of output circuit 100 according to the modification illustrated in FIG. 6 , output circuit 100 may include resistor 23 that is connected between first node X1 and ground line 80 b and resistors 26 a and 26 b that are connected in series between the pair of output signal terminals 92 a and 92 b, and may have a configuration in which a connection point (third node X3) of resistors 26 a and 26 b is electrically connected to first node X1. Resistors 26 a and 26 b have substantially equal resistance values to each other, and constitute another intermediate voltage circuit 26 (second intermediate voltage circuit) that generates, at third node X3, an intermediate voltage (second intermediate voltage) between the pair of output signal terminals 92 a and 92 b. The second intermediate voltage has an intermediate voltage value between a voltage value of output signal terminal 92 a and a voltage value of output signal terminal 92 b.

In the case of such a configuration, resistor 23 and resistors 26 a and 26 b function as pull-down resistors due to the presence of resistor 23 to prevent output signal terminals 92 a and 92 b from being charged. As a result, it is possible to prevent charges that are charged at output signal terminals 92 a and 92 b from being discharged to the outside, and the reliability of output circuit 100 can be further improved.

Further, with the configuration in which another intermediate voltage circuit 26 is connected to first node X1, the following effects are produced.

A commonly used clamp circuit is often used with connected between an internal power supply and a ground line. On the other hand, output circuit 100 of the present modification is an open collector circuit, and it is terminated at, for example, an external power supply which has a power supply voltage of 5.0 V. A voltage of internal power supply of the output circuit is, for example, 3.3 V, which is lower than the output common-mode voltage (for example, 4.0 V) when external load 102 is connected to output signal terminals 92 a and 92 b. As a result, it is difficult to adopt a configuration in which clamp circuit 60 is connected to the internal power supply because diodes 30 a and 30 b are turned on and a current flows from output signal terminals 92 a and 92 b to the internal power supply. It is also conceivable to avoid the turn-on of the diodes by adopting a configuration in which a plurality of diodes are connected in series instead of the single diode 30 a (or 30 b), but in this case, a voltage at output signal terminals 92 a and 92 b at the time of occurrence of an ESD increases, and there is a possibility that ESD protection becomes insufficient. Therefore, in the present modification, clamp circuit 60 is connected between ground line 80 b and third node X3 where an output common-mode voltage is generated.

Specifically, output circuit 100 of the present modification uses an output common-mode voltage generated by resistors 26 a and 26 b as a power supply voltage (first node X1) of clamp circuit 60. Thus, in a state (no signal state) in which output circuit 100 is not performing an operation of amplification, anode-cathode voltages of diodes 30 a and 30 b become 0 V. Further, during the operation of amplifying and outputting a differential signal by output circuit 100, diodes 30 a and 30 b are not turned on and remain at a high resistance when the difference between the voltage of output signal terminals 92 a and 92 b and the output common-mode voltage is smaller than rising voltages (for example, 0.6 V) of diodes 30 a and 30 b.

When a voltage change of output signal terminals 92 a and 92 b with respect to the common-mode voltage is ±0.6 V, a maximum amplitude of an output signal is 1.2 V at single end and 2.4 V at differential. Note that “single end” refers to a voltage value for either one of output signal terminals 92 a and 92 b, and “differential” refers to, for example, a differential voltage between output signal terminal 92 a and output signal terminal 92 b. Even when diodes 30 a and 30 b are not turned on, depletion layers shrink and anode-cathode capacitances increase with an increase in forward voltages of diodes 30 a and 30 b. As a result, since the operating bandwidth of output circuit 100 is lowered as the forward voltage increases, it is desirable to set the forward voltages of diodes 30 a and 30 b to be low.

On the other hand, in the case where the power supply voltage side (a node corresponding to first node X1) of clamp circuit 60 is not biased and is floated as in the output circuit described in Patent Literature 1, for example, diodes 30 a and 30 b are turned on due to an operation of modulation by output circuit 100, so that there is a possibility that a waveform of the output signal is distorted by the turn-on of diodes 30 a and 30 b. This may deteriorate a linearity of the output signal. In addition, since the forward voltages of diodes 30 a and 30 b are large and the capacitances between the anodes and the cathodes are large, there is a possibility that the operating bandwidth of output circuit 100 is lowered.

Specifically, in a configuration in which first node X1 is floated, in output circuit 100 in a no-signal state, the voltage of first node X1 is lower than the voltage of output signal terminals 92 a and 92 b by the rising voltage of diodes 30 a and 30 b because of a leakage current from first node X1 to ground line 80 b. For example, when MOS transistor 56 is in an OFF state, a current flows between the drain and the source through resistor 23 connected between the drain and the source. As a result, the voltage of first node X1 becomes a voltage (for example, 3.4 V) lower than the output common-mode voltage (for example, 4.0 V) by the rising voltage (for example, 0.6 V). At this time, since forward voltages between the anodes and the cathodes of diodes 30 a and 30 b are high (for example, 0.6 V), capacitances between the anodes and the cathodes may increase and the operating bandwidth of output circuit 100 may decrease.

In the case of the floating configuration, when the voltage of output signal terminal 92 a or the voltage of output signal terminal 92 b is increased by an operation of amplification of output circuit 100, the forward voltage of diode 30 a or the forward voltage of diode 30 b becomes higher (for example, 0.6 V or more), resulting in the turn-on of diode 30 a or diode 30 b. As a result, a current (charge current) flows from output signal terminal 92 a or output signal terminal 92 b to first node X1, which may cause a problem such as a distortion of waveform of the output signal. The charge current stops when the voltage of first node X1 increases and the forward voltages of diodes 30 a and 30 b becomes equal to or lower than the rising voltages. Therefore, such a problem is particularly likely to occur immediately after output circuit 100 enters a state of an operation of amplification from a no-signal state. However, since the voltage of first node X1 gradually decreases due to the current flowing through resistor 23, there is a possibility that the charge current continues to be generated with a certain amount and frequency until the forward voltages of diodes 30 a and 30 b become equal to or lower than the rising voltages again.

The problem associated with the charge current described above in the case of the floating configuration may be more severe when input/output signals of output circuit 100 are analog signals (e.g., sine waves) rather than digital signals (e.g., rectangular waves). For example, when the input/output signals are rectangular waves, since the input/output signals are differential signals, either one of output signal terminals 92 a and 92 b is at a high level (maximum voltage), except for a high-low transition, and charging of first node X1 through diode 30 a or diode 30 b is fast. On the other hand, when the input/output signals are sine waves, since the input/output signals are almost always in a transition state and are lower than the maximum voltage, charging of first node X1 through diode 30 a or diode 30 b is slow, as compared with rectangular waves. As a result, in a case of analog signals, there is a possibility that a distortion of waveform of an output signal occurs more frequently over a long time during an operation of amplification, as compared with digital signals.

Similarly, the above-described problem associated with the charge current in the case of the floating configuration may become more significant when input/output signals of output circuit 100 are not modulation signals having constant amplitudes (for example, non-return to zero (NRZ) signals) but amplitude-modulated signals having multiple values (for example, pulse amplitude modulation (PAM) 4 signals). This is because a frequency at which amplitudes of the input/output signals become maximum values (peak-to-peak values) are lower in modulation signals having multiple value amplitudes than in modulation signals whose amplitudes are constant. As a result, charging of first node X1 through diode 30 a or diode 30 b becomes slow, and in the case of amplitude-modulated signals having multiple values, there is a possibility that a distortion of waveform of an output signal occurs more frequently over a long time, as compared with modulation signals having constant amplitudes.

In the present modification, for example, binary signals (for example, NRZ signals) with constant amplitudes, amplitude-modulated signals (for example, PAM4 signals) with multiple values, or the like are used as input and output signals. When input/output signals are amplitude-modulated signals having multiple values, there is a possibility that the above-described problem associated with a charge current in a case of the floating configuration becomes more significant. However, in the present modification, since first node X1 is electrically connected to third node X3, first node X1 is biased with an output common-mode voltage by resistors 26 a and 26 b, so that such a problem is suppressed. When voltage changes of output signal terminals 92 a and 92 b due to an output signal is larger than the rising voltages of diodes 30 a and 30 b, turn-on of the diodes can be avoided by adopting a configuration in which the number of stages of diodes is increased, for example, by adopting a configuration in which diodes 30 a and 30 b are each changed to two transistors connected in series to each other.

According to the configuration of output circuit 100 of the present modification, since the discharge path when ESD is input is configured with ESD protection diodes and resistors, ESD protection of output circuit 100 becomes more reliable, and an effect of enabling high reliability is also obtained.

In this way, according to the configuration of output circuit 100 of the present modification, the discharge path when ESD occurs is configured with ESD protection diodes and resistors, so that ESD protection of output circuit 100 becomes more reliable, and high reliability can be achieved. In addition, by biasing clamp circuit 60 with an output common-mode voltage, it is possible to prevent an increase in capacitances between anodes and cathodes of the ESD protection diodes and the turn-on of the ESD protection diodes, thereby enabling an operation of amplification with a less distortion. As a result, it is possible to realize output circuit 100 that can perform an operation of amplification with a low distortion and is more reliable against ESD.

FIG. 7 illustrates a configuration of another modification of output circuit 100. This modification is different from the above-described embodiment in that a resistor 25 and an ESD protection circuit 66 for bipolar transistors 11 a and 11 b are added.

As illustrated in FIG. 7 , ESD protection circuit 66 includes diodes 31 and 36, a clamp circuit 61, ground lines 80 e and 80 f, and a power supply line 81. Diode 31 is connected between bias supply terminal 94 and power supply line 81. Diode 36 is connected between bias supply terminal 94 and ground line 80 e. Clamp circuit 61 is connected between power supply line 81 and ground line 80E Resistor 25 is connected between second node X2 and bias supply terminal 94.

In output circuit 100 of the above embodiment, since bases of bipolar transistors 11 a and 11 b are separated from the external power supply, there is a possibility that voltages between bases and collectors of bipolar transistors 11 a and 11 b exceed a maximum rating when ESD occurs. On the other hand, in output circuit 100 of this modification, resistor 25 (for example, a resistance value of 1 kΩ) is inserted between bias supply terminal 94 and second node X2. As a result, for example, when a positive ESD voltage is input to output signal terminals 92 a and 92 b, the bases of bipolar transistors 11 a and 11 b are also charged through resistors 21 a, 21 b, and 25, so that an increase in the voltages between the bases and the collectors is suppressed. In addition, when voltages between bases and emitters of bipolar transistors 11 a and 11 b increase, a collector current flows and charges the emitters, so that an increase in the voltages between the bases and the emitters is also suppressed. Further, the increase in the base voltages themselves is suppressed by ESD protection circuit 66. In this way, it is possible to reduce a possibility that bipolar transistors 11 a and 11 b are affected by ESD.

Here, a voltage of, for example, 2.5 V is supplied to bias supply terminal 94. A voltage of, for example, 3.3 V is supplied to power supply terminal 81 from the internal power supply. In this case, a reverse bias voltage between the anode and the cathode of diode 31 is, for example, 0.8 V, and diode 31 is not turned on. A plurality of diodes may be connected in series between bias supply terminal 94 and power supply line 81.

As described above, in the present modification, it is possible to reduce the possibility that bipolar transistors 11 a and 11 b are affected by ESD, as compared with the above-described embodiment. This allows a more reliable output circuit to be realized. 

What is claimed is:
 1. An electrostatic protection circuit comprising: a first output terminal and a second output terminal; a first node; a second node different from the first node; a first diode circuit connected between the first output terminal and the first node; a second diode circuit connected between the second output terminal and the first node; a first intermediate voltage circuit including a first dividing resistor, and a second dividing resistor, the first dividing resistor being connected between the first output terminal and the second node, and the second dividing resistor being connected between the second output terminal and the second node; a detection circuit configured to generate a trigger signal in accordance with a voltage at the second node, the detection circuit being connected between the second node and a ground line; and a switch circuit configured to electrically connect the first node to the ground line in accordance with the trigger signal, the switch circuit being connected between the first node and the ground line.
 2. The electrostatic protection circuit according to claim 1, wherein the first intermediate voltage circuit is connected between the first output terminal and the second output terminal, the first intermediate voltage circuit being configured to generate a first intermediate voltage at the second node, the first intermediate voltage having an intermediate voltage value between a voltage value of the first output terminal and a voltage value of the second output terminal; and wherein the electrostatic protection circuit further comprises: a second intermediate voltage circuit connected between the first output terminal and the second output terminal, the second intermediate voltage circuit being configured to generate a second intermediate voltage at the first node, the second intermediate voltage having an intermediate voltage value between the voltage value of the first output terminal and the voltage value of the second output terminal.
 3. The electrostatic protection circuit according to claim 1, wherein the detection circuit includes a detection node, a detection resistor connected between the second node and the detection node, and a capacitor connected between the detection node and the ground line, and wherein the detection circuit is configured to generate the trigger signal in accordance with a voltage of the detection node.
 4. The electrostatic protection circuit according to claim 3, wherein the detection circuit includes an inverter circuit configured to generate the trigger signal by inverting a voltage of the detection node.
 5. The electrostatic protection circuit according to claim 1, wherein, at the second node, the first intermediate voltage generates a first intermediate voltage having an intermediate voltage value between a voltage value of the first output terminal and a voltage value of the second output terminal; and wherein the detection circuit generates the trigger signal during a predetermined period of time in response to the first intermediate voltage having increased.
 6. The electrostatic protection circuit according to claim 1, wherein the switch circuit includes a switching element configured to switch between a conduction state in which the first node and the ground line are in electrical conduction with each other by setting a resistance between the first node and the ground line to a first resistance and a non-conduction state in which the first node and the ground line are in electrical non-conduction with each other by setting a resistance between the first node and the ground line to a second resistance greater than the first resistance.
 7. The electrostatic protection circuit according to claim 1, wherein the first diode circuit includes a first diode having a cathode connected to the first node and an anode connected to the first output terminal, and wherein the second diode circuit includes a second diode having a cathode connected to the first node and an anode connected to the second output terminal.
 8. A semiconductor integrated circuit comprising: the electrostatic protection circuit according to claim 1; and a differential amplifier circuit electrically connected to the first output terminal and the second output terminal.
 9. The semiconductor integrated circuit according to claim 8, wherein the differential amplifier circuit is configured to generate a differential output signal in accordance with a differential input signal and outputs the differential output signal to the first output terminal and the second output terminal.
 10. An electrostatic protection circuit comprising: a first output terminal and a second output terminal; a first diode circuit connected between the first output terminal and a first node; a second diode circuit connected between the second output terminal and the first node; a first intermediate voltage circuit connected between the first output terminal and the second output terminal, the first intermediate voltage circuit being configured to generate a first intermediate voltage at a second node that is different from the first node, the first intermediate voltage having an intermediate voltage value between a voltage value of the first output terminal and a voltage value of the second output terminal; a second intermediate voltage circuit connected between the first output terminal and the second output terminal, the second intermediate voltage circuit being configured to generate a second intermediate voltage at the first node, the second intermediate voltage having an intermediate voltage value between the voltage value of the first output terminal and the voltage value of the second output terminal; a detection circuit configured to generate a trigger signal in accordance with the first intermediate voltage; and a switch circuit configured to electrically connect the first node to a ground line in accordance with the trigger signal.
 11. The electrostatic protection circuit according to claim 10, wherein the first intermediate voltage circuit includes a first dividing resistor and a second dividing resistor, the first dividing resistor being connected between the first output terminal and the second node, the second dividing resistor being connected between the second output terminal and the second node.
 12. The electrostatic protection circuit according to claim 10, wherein the detection circuit includes a detection node, a detection resistor connected between the second node and the detection node, and a capacitor connected between the detection node and the ground line, and wherein the detection circuit is configured to generate the trigger signal in accordance with a voltage of the detection node.
 13. The electrostatic protection circuit according to claim 12, wherein the detection circuit includes an inverter circuit configured to generate the trigger signal by inverting a voltage of the detection node.
 14. The electrostatic protection circuit according to claim 10, wherein the detection circuit generates the trigger signal during a predetermined period of time in response to the first intermediate voltage having increased.
 15. The electrostatic protection circuit according to claim 10, wherein the switch circuit includes a switching element configured to switch between a conduction state in which the first node and the ground line are in electrical conduction with each other by setting a resistance between the first node and the ground line to a first resistance and a non-conduction state in which the first node and the ground line are in electrical non-conduction with each other by setting a resistance between the first node and the ground line to a second resistance greater than the first resistance.
 16. The electrostatic protection circuit according to claim 10, wherein the first diode circuit includes a first diode having a cathode connected to the first node and an anode connected to the first output terminal, and wherein the second diode circuit includes a second diode having a cathode connected to the first node and an anode connected to the second output terminal.
 17. A semiconductor integrated circuit comprising: the electrostatic protection circuit according to claim 11; and a differential amplifier circuit electrically connected to the first output terminal and the second output terminal.
 18. The semiconductor integrated circuit according to claim 17, wherein the differential amplifier circuit is configured to generate a differential output signal in accordance with a differential input signal and outputs the differential output signal to the first output terminal and the second output terminal. 